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KrF深紫外光刻胶系列
Kind 型号 Performance 性 能 Application 应 用 DK1081 R:0.18μm,Thickness range:0.4um-0.8μm AA/Poly/CT DK1080 R:0.25μm,Thickness range:0.55μm-1.0μm Implant/AA/CT DK1088 R:0.25μm,Thickness range:0.8μm-1.4μm TV/TM/Implant DK1089 R:0.25μm,Thickness range:0.8μm-1.4μm TV/TM/Implant DK1087 R:1μm,Thickness range:3-4μm Special application/ PAD DK2060 R:0.25μm,Thickness:0.55-0.8μm Contact/Hole DK3030 R:0.25μm,Thickness:0.6-0.8μm AA/Metal/Contact/Hole DKN1100 Krf Negative PR R:0.20μm,Thickness:0.4-0.8μm SAB/Implant i /g line正胶系列
Kind 型号 Performance 性 能 Application 应 用 C7600 R:0.30μm,Thickness range:7000A-12000A 0.3um process C7500 R:0.4μm,Thickness range:7000A-12000A 0.4μm process C7510 R:0.5μm,Thickness range:19000A-36000A 0.5um process C7310 R:0.45μm,Thickness:13000A-15000A 0.5μm process C8315 R:0.65μm,High heat resistance 0.65μm process C8325 R:0.9μm,Thickness:14000A-23000A 0.9μm process C8350 R:1.2μm,Thickness:20000A-35000A Metal/Passivation C5315 R:0.65μm,Thickness:10000A-17000A 0.65μm process EP3200A R:1.0μm,Thickness:20000-35000A LED positive resist Thick Film正胶系列
Kind 型号 Performance 性 能 Application 应 用 C6111A1 g-i line thick resist,Thickness:30000-50000A Implant/Passivation C6350A g-i line thick resist,Thickness:40000-80000A Passivation layer C6230 g-i line thick resist,Thickness:40000-80000A Implant/Passivation C6124A1 g-i line thick resist,Thickness:<11μm LED/Packaging CP4800/CP4900 For KOH and TMAH base developer Packaging/IGBT C9005 ICA PR,R:0.8μm,Thickness:3-8μm RDL/TSV lift off负胶系列
Kind 型号 Performance 性 能 Application 应 用 EN3120A1 R:2μm@4μm,Thickness:4.5-9.5μm,
High heat resistanceIC/LED E3130A Lift off negative resist,High resolution IC/LED E3260A2/S R:5μm@8μm,<100mj/cm2,Thickness:6-12μm IC/LED E3502 R:0.6μm@2.4μm,Thickness:2-4μm,Easy strip IC/LED E3510 R:6μm@14μm,Thickness:5-20μm,Easy strip IC/LED E3175/B R:2.0μm@3.8μm,Small undercut,Thickness:2-4μm IC/LED BP正胶系列
Kind 型号 Performance 性 能 Application 应 用 BP218 通用型正胶 IC/MEMS BP212 通用型正胶 IC/MEMS 分立器件负胶系列
Kind 型号 Performance 性 能 Application 应 用 BN310 高分辨负胶 分立器件 BN303 通用型负胶 分立器件 BN308 高抗蚀负胶 分立器件
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